TY  - BOOK
AU  - Quinten, Michael 
TI  - A Practical Guide to Optical Metrology for Thin Films
SN  - 9783527411672 (Print)
PY  - 2013///.
CY  - Weinheim, Germany
PB  - Wiley-VCH Verlag & Co. KGaA
KW  - Optical Sensors Basics and Applications
N1  - Includes Reference and Index
UR  - https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/9783527664344?download=true
ER  -