TY  - BOOK
AU  - Bechtold, Tamara 
TI  - System‐Level Modeling of MEMS
SN  - 9783527319039 
PY  - 2013///.
CY  - Weinheim, Germany
PB  - Wiley‐VCH Verlag GmbH & Co.
N1  - Includes Index
UR  - https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/9783527647132?download=true
ER  -