TY  - GEN
AU  - Dufour,Isabelle
AU  - 
AU  - Josse,Fabien
TI  - Resonant MEMS: fundamentals, implementation and application 
T2  - Advanced micro & nanosystems
SN  - 9783527335459 
U1  - 621.381 23
PY  - 2015///
CY  - Germany
PB  - Wiley‐VCH Verlag GmbH & Co. 
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
UR  - https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/9783527676330?download=true
ER  -