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System‐Level Modeling of MEMS / Edited by Tamara Bechtold...[et al]

Contributor(s): Material type: TextTextPublication details: Weinheim, Germany : Wiley‐VCH Verlag GmbH, c 2013.Description: xxvii, 530 p. : illISBN:
  • 9783527319039
  • 9783527647132
Subject(s): DDC classification:
  • 23 621.381
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Last Updated Oct 16, 2019.
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