| 000 | 00655nam a2200193 4500 | ||
|---|---|---|---|
| 003 | BD-DhGUBL | ||
| 005 | 20251012101400.0 | ||
| 008 | 251012s2013 ge a|||| |||| 001 0 eng d | ||
| 020 | _a9783527319039 | ||
| 020 | _a9783527647132 | ||
| 040 |
_aBD-DhGUBL _cBD-DhGUBL _dBD-DhGUBL |
||
| 245 |
_aSystem‐Level Modeling of MEMS / _cedited by Tamara Bechtold [ et al] |
||
| 260 |
_aWeinheim, Germany : _bWiley‐VCH Verlag GmbH & Co., _cc 2013. |
||
| 300 |
_axxvii, 530 p. : _bill. |
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| 500 | _aIncludes Index | ||
| 700 | _aBechtold, Tamara | ||
| 856 | _uhttps://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/9783527647132?download=true | ||
| 942 |
_2ddc _cBK |
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| 999 |
_c5249 _d5249 |
||