| 000 | 00944nac a2200253 a 4500 | ||
|---|---|---|---|
| 003 | BD-DhGUBL | ||
| 005 | 20251210100702.0 | ||
| 008 | 251210s2015 ge a b 001 0 eng | ||
| 020 | _a9783527335459 | ||
| 020 | _a9783527676330 | ||
| 040 |
_aBD-DhGUBL _eBD-DhGUBL _cBD-DhGUBL |
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| 082 | 0 | 4 |
_a621.381 _223 |
| 245 | 0 | 0 |
_aResonant MEMS : _bfundamentals, implementation and application / _cedited by Oliver Brand...[et al.] |
| 260 |
_aGermany : _bWiley‐VCH Verlag GmbH & Co. _cc 2015. |
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| 300 |
_axxv, 483 p. : _bill. ; |
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| 490 | 1 | _aAdvanced micro & nanosystems | |
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 700 | 1 |
_aDufour, Isabelle _eeditor. |
|
| 700 | 1 |
_cHeinrich, Stephen M. _eeditor. |
|
| 700 | 1 |
_aJosse, Fabien _eeditor. |
|
| 856 |
_uhttps://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/9783527676330?download=true _yClick here to download |
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| 942 |
_2ddc _cEBK |
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| 999 |
_c5530 _d5530 |
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