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Resonant MEMS : fundamentals, implementation and application /

Resonant MEMS : fundamentals, implementation and application / edited by Oliver Brand...[et al.] - Germany : Wiley‐VCH Verlag GmbH & Co. c 2015. - xxv, 483 p. : ill. ; - Advanced micro & nanosystems .

Includes bibliographical references and index.

9783527335459 9783527676330


Microelectromechanical systems.

621.381


Last Updated Oct 16, 2019.
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