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Resonant MEMS : fundamentals, implementation and application / edited by Oliver Brand...[et al.]

Contributor(s): Material type: TextTextSeries: Publication details: Germany : Wiley‐VCH Verlag GmbH & Co. c 2015.Description: xxv, 483 p. : illISBN:
  • 9783527335459
  • 9783527676330
Subject(s): DDC classification:
  • 621.381 23
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Includes bibliographical references and index.

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Last Updated Oct 16, 2019.
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